Soft ceramic work plate
 |
Chuck |
 |
| Model |
Component No. |
Specification |
| ID |
OD |
Thickness |
Radius |
Roughness
R a（μm) |
| R1 |
R2 |
| M88-1 |
880110 |
8.1 |
45 |
5 |
3 |
|
0.85-1.3 |
| 880112 |
45 |
6 |
3.5 |
|
0.85-1.3 |
| 880113 |
45.5 |
6 |
3.5 |
|
0.85-1.3 |
| 880115 |
50 |
5 |
3 |
|
0.85-1.3 |
| M88-2 |
880210 |
12.0 |
45 |
4 |
2.5 |
|
0.85-1.3 |
| 880215 |
45 |
5 |
3 |
|
0.85-1.3 |
| 880216 |
45 |
6 |
3.5 |
|
0.85-1.3 |
| 880217 |
45 |
6 |
5.5 |
1.75 |
0.85-1.3 |
| 880218 |
45.5 |
6 |
3.5 |
|
0.85-1.3 |
| 880219 |
46 |
6 |
3.5 |
|
0.85-1.3 |
| 880220 |
49.62 |
6 |
3.5 |
|
0.85-1.3 |
| 880221 |
49.62 |
6 |
5.5 |
1.75 |
0.85-1.3 |
| 880222 |
49.98 |
6 |
3.5 |
|
0.85-1.3 |
| 880223 |
48 |
9 |
5.5 |
|
0.85-1.3 |
| 880224 |
49.98 |
9 |
5.5 |
|
0.85-1.3 |
| 880225 |
52 |
9 |
5.5 |
|
0.85-1.3 |
| M88-3 |
880310 |
14.45 |
49.62 |
6 |
3.5 |
|
0.85-1.3 |
| 880311 |
50 |
6 |
3.5 |
|
0.85-1.3 |
| 880312 |
52 |
6 |
3.5 |
|
0.85-1.3 |
| 880313 |
50 |
9 |
5.5 |
|
0.85-1.3 |
| 880314 |
52 |
9 |
5.5 |
|
0.85-1.3 |
| M88-4 |
880410 |
16 |
45 |
4 |
2.5 |
|
0.85-1.3 |
| 880411 |
45 |
6 |
3.5 |
|
0.85-1.3 |
| 880412 |
52 |
9 |
5.5 |
|
0.85-1.3 |
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